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1月8日學術報告:集成電路與光刻機

來源: 發布時間:2020-01-05【字體:

  報告題目:集成電路與光刻機

  報告人:王向朝 研究員 中國科學院上海光學精密機械研究所

  報告時間:2021年1月8日 13:30~16:30

  報告地點:羲和廳(原多功能廳)

 

  摘要:

  GUANGKEJISHIJICHENGDIANLUZHIZAODEHEXINZHUANGBEI,ZHIJIEJUEDINGLEJICHENGDIANLUDEWEIXIHUASHUIPING。GUANGKEJIXIANGZHIJIANCEJISHUSHIZHICHENGGUANGKEJIZHENGJIYUFENXITONGMANZUGUANGKEJIFENBIANLV、TAOKEJINGDUDENGXINGNENGZHIBIAOYAOQIUDEGUANJIANJISHU。BENCIBAOGAOJIANGJIESHAOGUANGKEJIDEFAZHANLICHENG、GUANGKEJIZHENGJI、FENXITONGYUPUGUANGGUANGYUANDEZHUYAOGONGNENG、JIBENJIEGOU、GONGZUOYUANLI、GUANJIANJISHUDENGNEIRONG,BINGJIESHAOGUOJIZHULIUDEGUANGKEJIXIANGZHIJIANCEJISHUYIJIBENTUANDUITICHUDEXILIEXINJISHU。

 

  報告人簡介:

  WANGXIANGCHAO,ZHONGGUOKEXUEYUANSHANGHAIGUANGXUEJINGMIJIXIEYANJIUSUOYANJIUYUAN,GUOJIAKEJIZHONGDAZHUANXIANG“JIDAGUIMOJICHENGDIANLUZHIZAOZHUANGBEIJICHENGTAOGONGYI”(02ZHUANXIANG)ZONGTIZHUANJIAZUZHUANJIA。HUOGUOJIYUGUONEISHOUQUANFAMINGZHUANLI160YUXIANG,ZAIGUOJIYUGUONEIGUANGXUEYUGUANGKELINGYUZHULIUQIKANFABIAOXUESHULUNWEN360YUPIAN。PEIYANGBOSHIYANJIUSHENG60YUMING(HANWOGUOGAODUANGUANGKEJIZHENGJIJISHULINGYUDIYIPIBOSHIYANJIUSHENG)。

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